New Oerlikon Leybold TurboVac SL80 & TW70H Water Cooling Unit. The SL80 & TW70H TURBOVAC turbo pumps can be cooled by water, air, or ambient cooling. Important, ambient cooling is only allowed for very low gas throughput, with low backing pressures (example 5 mTorr), and operated in a cool environment. We recommend at least air cooling for most applications. The SL-80 turbo pumps can be backed with foreline pressures as high as 15 Torr (20 mBar), water cooling is required for higher foreline pressure operation as the pump will produce extra heat.
This new generation of SL TURBOVAC turbomolecular pumps have improved mechanical rotor suspension and compound stage excels through a new compact design, improved vacuum performance and a standardized accessories program. The SL series pumps are among the quietest turbo pumps on the market today, the SL 80 pumps have less than 46 dB(A). The Oerlikon Leybold SL-80 with ISO-63 inlet flange has a 65 l/s pumping speed for nitrogen, can have an ultimate pressure as low as 1.5×10-10 Torr when backed with oil sealed rotary vane pump, and has a KF-16 roughing flange.
The Oerlikon Leybold TURBOVAC SL turbomolecular pumps are highly flexible regarding the controller-mounting position, which can be placed onboard, as a bench-top unit or in a rack. In addition, the pumps can be mounted in virtually any position and at any angle. The turbomolecular pumps from the TURBOVAC SL product family are designed to handle the most advanced and demanding applications and requirements in research and industry and many more applications.