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NEW Agilent Varian IDP-3 Dry Oil-Free Scroll Vacuum Pump With Inlet Valve Kit PN IDP3B21, 115 VAC


$3,640.66 $3,957.24

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The Varian IDP-3 dry scroll vacuum pumps is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The Varian IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m (2.1 CFM) and a very low base pressure of less than 2.5×10-1 Torr. The Varian IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package. This pump is factory installed with an Inlet Valve Kit, for applications where the process is sensitive to pump debris that can be carried back into the pump at turn off. These new Varian IDP-3 dry oil-free scroll vacuum pumps (Product Number IDP3B21) operate on 1 Ph, 115 VAC, 50/60 Hz. An Instruction Manual and Brochure PDF on the IDP3 Scroll Pumps can be downloaded, by scrolling down to (AVAILABLE DOWNLOADS)

APPLICATIONS INCLUDE:
Analytical Instrumentation
• GC/MS
• Residual gas analyzers
• Load locks for mass spectrometers
• Electron microscopes
• Surface area analyzers
• EM Sample prep coaters

Semiconductor Fabrication
• Gas panels
• Gas delivery systems
• Double wall containment vessels

High Energy Physics
• Accelerators
• Beam lines
• Synchrotrons

Industrial processing
• Laser evacuation
• Cryogenic dewars
• Glove boxes
• Gas recovery and recirculation
• Cryopump roughing
• Tube processing
• Vacuum chucks.

General Research & Development
• Experimental chambers
• Sample prep systems
• Surface analysis systems
• Backing turbo pump on beam lines.

Category:
IDP-2 IDP-3
Peak pumping speed 60Hz 35 l/m, 2.1 m3/hr, 1.2 cfm 60 l/m, 3.6 m3/hr, 2.1 cfm
50Hz 30 l/m, 1.8 m3/hr, 1.1 cfm 50 l/m, 3.0 m3/hr, 1.8 cfm
Ultimate pressure 7.5 x 10-1 torr (1.0 mbar, 100 Pa) 2.5 x 10-1 torr (3.3 x 10-1 mbar, 33 Pa)
Maximum inlet pressure 1 atmosphere (1.0 bar, 101 kPa)
Maximum outlet pressure 1.4 atmospheres (1.4 bar, 142 kPa)
Inlet connection NW16 KF flange
Exhaust connection Female 1⁄4” NPT (10 mm hose barb provided)
Gas ballast connection Female 1⁄8” NPT
Ambient operating temperature 5 to 40°C (41 to 108°F)
Storage temperature –20 to 60 °C (–4 to 140°F)
Motor rating 0.16 horsepower (0.12 kW)
Supply power 1Ø – 100 VAC, 50-60 Hz : 1 5 VAC, 60 Hz : 220-240 VAC, 50-60 Hz
Motor thermal protection Automatic
Rotation speed 60Hz 3200 RPM
50Hz 2600 RPM
Cooling Air-cooled
Weight 9.5 kg (21 lbs)
Shipping weight 10.5 kg (23 lbs)
Restrictions No corrosive, explosive, or particulate-forming gases
Leak rate <1 x 10-6 std-cc/sec helium
Noise level (per ISO 11201) 55 dB(A)
Vibration level at inlet (per ISO 10816-1) 1.5 mm/second
Compliance Conforms with CE, CSA, CSA/CUS, Semi S2-703, and RoHS