NEW Agilent Varian IDP-3 Dry Oil-Free Scroll Vacuum Pump With Inlet Valve Kit PN IDP3A21, 220 VAC
$3,630.54 $3,946.24
The Varian IDP-3 dry scroll vacuum pumps is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The Varian IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m (2.1 CFM) and a very low base pressure of less than 2.5×10-1 Torr. The Varian IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package. These new Varian IDP-3 dry oil-free scroll vacuum pumps (Product Number IDP3D01) operate on 1 Ph, 24 VDC.
APPLICATIONS INCLUDE:
Analytical Instrumentation
• GC/MS
• Residual gas analyzers
• Load locks for mass spectrometers
• Electron microscopes
• Surface area analyzers
• EM Sample prep coaters
Semiconductor Fabrication
• Gas panels
• Gas delivery systems
• Double wall containment vessels
High Energy Physics
• Accelerators
• Beam lines
• Synchrotrons
Industrial processing
• Laser evacuation
• Cryogenic dewars
• Glove boxes
• Gas recovery and recirculation
• Cryopump roughing
• Tube processing
• Vacuum chucks.
General Research & Development
• Experimental chambers
• Sample prep systems
• Surface analysis systems
• Backing turbo pump on beam lines.
| IDP-2 | IDP-3 | ||
| Peak pumping speed | 60Hz | 35 l/m, 2.1 m3/hr, 1.2 cfm | 60 l/m, 3.6 m3/hr, 2.1 cfm |
| 50Hz | 30 l/m, 1.8 m3/hr, 1.1 cfm | 50 l/m, 3.0 m3/hr, 1.8 cfm | |
| Ultimate pressure | 7.5 x 10-1 torr (1.0 mbar, 100 Pa) | 2.5 x 10-1 torr (3.3 x 10-1 mbar, 33 Pa) | |
| Maximum inlet pressure | 1 atmosphere (1.0 bar, 101 kPa) | ||
| Maximum outlet pressure | 1.4 atmospheres (1.4 bar, 142 kPa) | ||
| Inlet connection | NW16 KF flange | ||
| Exhaust connection | Female 1⁄4” NPT (10 mm hose barb provided) | ||
| Gas ballast connection | Female 1⁄8” NPT | ||
| Ambient operating temperature | 5 to 40°C (41 to 108°F) | ||
| Storage temperature | –20 to 60 °C (–4 to 140°F) | ||
| Motor rating | 0.16 horsepower (0.12 kW) | ||
| Supply power | 1Ø – 100 VAC, 50-60 Hz : 1 5 VAC, 60 Hz : 220-240 VAC, 50-60 Hz | ||
| Motor thermal protection | Automatic | ||
| Rotation speed | 60Hz | 3200 RPM | |
| 50Hz | 2600 RPM | ||
| Cooling | Air-cooled | ||
| Weight | 9.5 kg (21 lbs) | ||
| Shipping weight | 10.5 kg (23 lbs) | ||
| Restrictions | No corrosive, explosive, or particulate-forming gases | ||
| Leak rate | <1 x 10-6 std-cc/sec helium | ||
| Noise level (per ISO 11201) | 55 dB(A) | ||
| Vibration level at inlet (per ISO 10816-1) | 1.5 mm/second | ||
| Compliance | Conforms with CE, CSA, CSA/CUS, Semi S2-703, and RoHS | ||
